Force detection device
US10288498B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 4, 2016 |
| Grant date | May 14, 2019 |
| Priority date | — |
| Expiry date | Apr 4, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01C10/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A force detection device includes: a substrate; and a force transmission block. The substrate includes: a mesa gauge arranged on a principal plane of the substrate and providing a bridge circuit; a connection region arranged on the principal plane; and a sealing portion surrounding all around the mesa gauge and connected to the force transmission block. The mesa gauge includes: a first mesa gauge extending in a first direction; and a second mesa gauge extending in a second direction and spaced apart from the first mesa gauge. The connection region electrically connects the one end of the first mesa gauge and the one end of the second mesa gauge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.