Pressure sensor, especially pressure difference sensor

US10288508B2 · kind B2 · utility

Assignee

• Endress+Hauser SE+Co. KG · DE

Inventors

• Timo Kober · Potsdam, DE
• Michael Philipps · Lörrach, DE
• Dieter Stolze · Potsdam, DE
• Anh Tuan Tham · Berlin, DE
• Roland Werthschutzky · Kleinmachnow, DE

Key dates

• Filing date: Nov 2, 2016
• Grant date: May 14, 2019
• Expiry date: Mar 17, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L19/0618
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The pressure sensor of the invention includes at least one platform, at least one measuring membrane 30, and a transducer, wherein the measuring membrane comprises a semiconductor material, wherein the measuring membrane, enclosing a pressure chamber, is secured on the platform, wherein the measuring membrane is contactable with at least one pressure and is elastically deformable in a pressure-dependent manner, wherein the transducer provides an electrical signal dependent on deformation of the measuring membrane, wherein the platform has a membrane bed, on which the measuring membrane lies in the case of overload, in order to support the measuring membrane, wherein the membrane bed 21 has a glass layer 20, whose surface faces the measuring membrane and forms a wall of the pressure chamber, wherein the surface of the glass layer has a contour, which is suitable for supporting the measuring membrane 30 in the case of overload, characterized in that the contour of the membrane bed 21 is obtainable by a sagging of an unsupported region of a glass plate at increased temperature, due to the force of gravity on the unsupported region of the glass plate, and subsequent cooling of the glas…