Patent · US Active

Relative pressure sensor

US10288511B2 · kind B2 · utility

0Cited by

0References

6Claims

0Family size

Assignee

VEGA Grieshaber KG · DE

Inventors

Bernhard Weller · Wolfach, DE
Johannes Seiffe · Glückstadt, DE

Key dates

Filing date	Oct 18, 2016
Grant date	May 14, 2019
Priority date	—
Expiry date	Apr 1, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG01L19/0092
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention is a method for determining an output value, which is equivalent to a pressure or a value proportional to the pressure, comprising a relative pressure sensor with at least one measured capacity formed between a basic body and a measuring membrane and at least one reference capacity formed between the basic body and the measuring membrane, with the determination of the output value comprising at least the following steps: (1) determining the measured capacity, (2) determining the reference capacity, (3) comparing a value of a first function FZ of the reference capacity to the measured capacity and (4) issuing A=FQ(CM,CR) for CM=FZ(CR)A=FCR(CR) for CM>FZ(CR)A=FCM(CM) for CM<FZ(CR) as the output value.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.