Patent · US Active

Substrate deposition systems

US10288771B1 · kind B1 · utility

1Cited by
0References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 11, 2017
Grant dateMay 14, 2019
Priority date
Expiry dateOct 11, 2037

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC23C30/00
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A substrate deposition system includes a system frame; a plurality of processing tanks carried by the system frame, the plurality of processing tanks adapted to contain liquid coating materials of different light refractive indexes; at least one actuator disposed in proximity to the plurality of processing tanks, the at least one actuator adapted to sequentially immerse at least one substrate in the liquid coating materials and transfer the at least one substrate between the plurality of processing tanks; and at least one coating system located in a process flow downstream direction from the plurality of processing tanks, the at least one coating system adapted to apply an antireflective coating to the at least one substrate. A lens surface location measuring system is also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.