Micromachined ultrasonic transducers with a slotted membrane structure
US10293377B2 · kind B2 · utility
7Cited by
2References
48Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 28, 2016 |
| Grant date | May 21, 2019 |
| Priority date | — |
| Expiry date | May 2, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0127
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. A portion of the membrane that overlies the opening is divided into a plurality of cantilevers that are mechanically coupled so that the cantilevers resonate at a common frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.