Templated nanostructure sensors and methods of manufacture

US10294099B1 · kind B1 · utility

Assignee

• The United States of America as represented by the Administrator of the National Aeronautics and Space Administration · US

Inventors

• Azlin M. Biaggi-Labiosa · Cleveland, US
• Gary W. Hunter · Oberlin, US

Key dates

• Filing date: Mar 7, 2013
• Grant date: May 21, 2019
• Expiry date: Sep 2, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N33/0047
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A microsensor and its method of manufacture are disclosed based on templated metal or metal oxide nanostructures. The microsensor includes an electrode that in one embodiment may be configured as a first sawtooth patterned electrode having a series of first peaks and first valleys and a second electrode that by be configured as a second sawtooth patterned electrode having a series of second peaks and second valleys where the second peaks generally align with the first peaks of the first electrode. A plurality of templated metal or metal oxide nanostructures connect on one side to the first electrode and on another side to the second electrode, where an electrical property of the microsensor changes in response to exposure to an environment to be monitored.