System and method for detecting concentration of a gas in a gas stream
US10295518B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 14, 2016 |
| Grant date | May 21, 2019 |
| Priority date | — |
| Expiry date | Sep 7, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N25/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and method for detecting a concentration of a gas in a gas stream are disclosed. A method includes receiving a gas stream including a carrier gas and a processing gas. Bridge voltages of a mass flow sensor are used to produce a processing-gas concentration signal and a gas-stream mass flow rate signal. The gas stream is controlled so a mass flow rate of the processing gas equals a processing-gas-setpoint signal. In some variations, the processing-gas-concentration signal is produced using an upstream temperature of the gas stream and a bridge-derived temperature. In other variations, the processing-gas-concentration signal is produced using a top voltage of the mass flow sensor and the gas-stream mass flow rate signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.