Sensor
US10295532B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Feb 22, 2016 |
| Grant date | May 21, 2019 |
| Priority date | — |
| Expiry date | Feb 22, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/5308
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor is provided with a sensor element which outputs a signal in accordance with a detected object contained in a specimen positioned on a detection part in an element surface and with a package which accommodates the sensor element inside it and has a passage including a space positioned on the element surface. A lower surface of the passage has the element surface and a lower surface of an inflow passage extending toward the space, and a gap is positioned between the lower surface of the inflow passage and the element surface. The element surface is positioned above the lower surface of the inflow passage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.