Position determination method and element
US10295754B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 1, 2018 |
| Grant date | May 21, 2019 |
| Priority date | — |
| Expiry date | May 1, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3885
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A position determination method for determining a position of a point on a flat surface by observing the position of the point and a position of a fiducial portion on the flat surface in an image of a measuring system provided with an imaging optical system using coaxial episcopic illumination is provided. The fiducial portion is in the shape of a pillar at least in the basal portion and provided with an inclined surface surrounding the foot of the pillar. The method includes the steps of determining a position of the outer boundary of the foot from the boundary between the inclined surface and the flat surface in the image; determining the position of the fiducial portion from the position of the outer boundary of the foot; and determining the position of the point with respect to the position of the fiducial portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.