Treating arcs in a plasma process
US10297431B2 · kind B2 · utility
35Cited by
4References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 3, 2017 |
| Grant date | May 21, 2019 |
| Priority date | — |
| Expiry date | Aug 3, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3322
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An arc treatment device includes an arc detector operable to detect whether an arc is present in a plasma chamber, an arc energy determiner operable to determine an arc energy value based on an energy supplied to the plasma chamber while the arc is present in the plasma chamber, and a break time determiner operable to determine a break time based on the determined arc energy value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.