Patent · US Active

Method for producing an electronic component and electronic component

US10297469B2 · kind B2 · utility

0Cited by

13References

18Claims

0Family size

Assignee

Osram OLED GMBH · DE

Inventors

Christian Schmid · San Diego, US
Tilman Schlenker · Nittendorf, DE
Heribert Zull · Regensburg, DE
Ralph Paetzold · Roth, DE
Markus Klein · Glückstadt, DE
Karsten Heuser · Erlangen, DE

Key dates

Filing date	Nov 13, 2014
Grant date	May 21, 2019
Priority date	—
Expiry date	Nov 13, 2034

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P70/50
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A method for producing an electronic component and an electronic component, having barrier layers for the encapsulation of the component. The method involves providing a substrate (1) with at least one functional layer (22), and an electronic component, applying at least one first barrier layer (3) on the functional layer (22) by way of plasmaless atomic layer deposition (PLALD), and applying at least one second barrier layer (4) on the functional layer (22) by way of plasma-enhanced chemical v0apor deposition (PECVD).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.