Optical slit for a spectrometer that incorporates a wavelength calibration light source
US10302488B2 · kind B2 · utility
0Cited by
0References
2Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 17, 2018 |
| Grant date | May 28, 2019 |
| Priority date | — |
| Expiry date | May 17, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/104
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical slit device that combines microelectromechanical design techniques, semiconductor laser technology, and micro-optics to provide a spectrometer entrance slit on a semiconductor substrate with integrated calibration light sources, which integrated light enters the entrance slit and is transmitted down the same optical path as a light source under test and by which the spectrometer can be wavelength calibrated in situ is disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.