Optically stimulated electron emission measurement device and method for characterizing and comparing levels and species of surface contaminants
US10302556B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 14, 2016 |
| Grant date | May 28, 2019 |
| Priority date | — |
| Expiry date | Dec 31, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/068
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems, methods, instruments and devices of the various embodiments enable improved characterization and comparison of the level and species of surface contaminants from photo-induced emission analysis. The various embodiments may provide flexibility for calculating and analyzing the time-dependence of emission efficiencies. Irregular and heterogeneous surfaces, including regionally multiply-connected surface compositions, may be analyzed according to the various embodiments, and the various embodiments include techniques that support specific contaminant identification. Various embodiment focusing techniques may enhance assessment of spatially differential regional analysis of the substrate for more critical applications. The various embodiments may also include differential comparison with reference surfaces, either through differential comparison while scanning, or by comparison to digitally stored responses to known contaminants.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.