Cooler for use in a device in a vacuum

US10303067B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Willi Anderl · Wertingen, DE
• Bernhard Weigl · Seattle, US
• Ann-Kathrin Wandner · Warstein, DE
• Holger Kierey · Aalen, DE
• Arno Schmittner · Oberkochen, DE
• Markus Bauer · Oberkochen, DE
• Marcus Schmelzeisen · Oberkochen, DE
• Andreas Kolloch · Aalen, DE

Key dates

• Filing date: Mar 24, 2016
• Grant date: May 28, 2019
• Expiry date: May 10, 2036

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F28F2265/16
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The disclosure relates to a cooler for use in a device in a vacuum, wherein the partial pressure of the cooling medium in the vacuum environment during the operation of the cooler is less than 10−3 mbar. The cooler includes a heat sink, wherein a cavity through which the cooling medium flows is formed in the heat sink, and wherein the heat sink includes a connection element which surrounds one end of the cavity through which the cooling medium flows. The cooler also includes a connecting piece for joining a coolant line to the cavity. The connecting piece includes a jacket secured on the connection element by a thermal connecting process. An intermediate layer is between the jacket and the connection element. The jacket exerts a force in the direction of the connection element so that the intermediate layer is under compressive stress in the radial direction during operation of the cooler.