Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
US10308505B1 · kind B1 · utility
9Cited by
150References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 11, 2014 |
| Grant date | Jun 4, 2019 |
| Priority date | — |
| Expiry date | Sep 4, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C21/18
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A device preferably for use in an inertial navigation system the device having a single IC wafer; a plurality of sensors bonded to bond regions on said single IC wafer, at least one of said bond regions including an opening therein in gaseous communication with a pressure chamber associated with at least one of the plurality of said sensors; and a plurality of caps encapsulating said plurality of sensors, at least one of said plurality of caps forming at least a portion of said pressure chamber. A method of making the device is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.