Film chamber with measuring volume for gross leak detection

US10309862B2 · kind B2 · utility

Assignee

• INFICON AG · LI

Inventors

• Silvio Decker · Cologne, DE
• Norbert Rolff · Horrem, DE

Key dates

• Filing date: Sep 14, 2015
• Grant date: Jun 4, 2019
• Expiry date: Dec 30, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01M3/3281
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A film chamber for receiving a test object which is to be tested with respect to the presence of a leak, wherein the film chamber has walls enclosing a film chamber volume, said walls having at least one flexible wall region, wherein a measuring volume adjoining the flexible wall region is arranged on the side of the flexible wall region which is situated opposite the film chamber volume and is hermetically separated from the film chamber volume.