Electromagnetic wave detector and gas analysis device having dual electromagnetic wave sensors for detecting one of light in a predetermined wavelength band and predetermined polarization
US10309895B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 4, 2016 |
| Grant date | Jun 4, 2019 |
| Priority date | — |
| Expiry date | May 16, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/4972
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electromagnetic wave detector including a first electromagnetic wave sensor including a light reception unit held in midair above a substrate by a support leg and a second electromagnetic wave sensor including a light reception unit held in midair above the substrate by a support leg having same structure as the support leg of the first electromagnetic wave sensor and provided adjacent to the first electromagnetic wave sensor. The light reception unit of the first electromagnetic wave sensor includes a reflective film, the light reception unit of the second electromagnetic wave sensor includes an electromagnetic wave absorption body for detecting light of a prescribed wavelength band or a prescribed polarization, and the difference between the output of the second electromagnetic wave sensor and the first electromagnetic wave sensor is output.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.