Patent · US Active

Extinguishing arcs in a plasma chamber

US10312064B2 · kind B2 · utility

6Cited by

47References

20Claims

0Family size

Assignee

TRUMPF HUETTINGER GMBH + CO. KG · DE

Inventors

Andre Grede · Glückstadt, DE
Daniel Krausse · Mountain View, US
Anton Labanc · Ehrenkirchen, DE
Christan Thome · Glückstadt, DE
Alberto Vidal · San Jose, US

Key dates

Filing date	Jun 18, 2018
Grant date	Jun 4, 2019
Priority date	—
Expiry date	Jun 18, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3299
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A power supply system includes a digital-to-analogue converter (DAC) configured to generate an analogue signal and an amplifier path on which the analogue signal is amplified to generate a high-frequency power signal to be provided to a plasma chamber for supplying a plasma process with high-frequency power. The DAC is configured to be connected to an arc detection device that is configured to monitor the plasma chamber for arcs and be controlled by the arc detection device to modify the analogue signal in response to detecting an occurrence of an arc.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.