Substrate storage container
US10312122B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 21, 2015 |
| Grant date | Jun 4, 2019 |
| Priority date | — |
| Expiry date | Jul 21, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67393
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The substrate storage container includes a container main body, an air feed valve, and an air replacement unit. The container main body is formed in a front open box form with the air feed valve attached to the rear of the bottom plate. The air replacement unit includes a housing and a cover that covers the open front of the housing. The bottom of the housing is connected to the air feed valve so as to flow the purge gas while the housing is supported at the upper portion thereof by a rear wall of the container main body. Either the housing or the cover is formed with a plurality of blow holes for blowing the purge gas toward the front of the container main body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.