Ultrasonic transducer
US10315224B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 13, 2016 |
| Grant date | Jun 11, 2019 |
| Priority date | — |
| Expiry date | Feb 18, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG10K9/122
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Systems and techniques are provided for an ultrasonic transducer. A substrate may include a main cavity, a secondary cavity, and a channel. The main cavity may have a greater depth than the secondary cavity. The secondary cavity may have a greater depth than channel. A first step may be formed where the main cavity and the secondary cavity overlap. A second step may be formed where the secondary cavity and the main cavity overlap. An electromechanically active device may be attached to the substrate at the first step and the second step such that a free end of the electromechanically active device is suspended over the main cavity. A membrane section may be bonded to the substrate such that the membrane covers the main cavity and the secondary cavity and is bonded to the free end of the electromechanically active.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.