X-ray scatter systems and methods for detecting structural variations
US10317349B2 · kind B2 · utility
2Cited by
9References
19Claims
0Family size
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Key dates
| Filing date | Nov 30, 2015 |
| Grant date | Jun 11, 2019 |
| Priority date | — |
| Expiry date | Jul 14, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/303
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Embodiments of the present disclosure provide systems and methods for detecting one or more thermal and/or mechanical properties of a structure. The method may include forming one or more test structures from a material that forms the structure, generating and storing calibration data determined from the one or more test structures, emitting X-ray radiation into the structure, detecting X-ray scatter from the structure, and determining the one or more properties of the structure based on the detected X-ray scatter and the calibration data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.