Grating coupler and preparation method
US10317584B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 8, 2017 |
| Grant date | Jun 11, 2019 |
| Priority date | — |
| Expiry date | Dec 8, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12107
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A grating coupler and a preparation method thereof are provided. The grating coupler includes a substrate layer, a lower confining layer, a waveguide core layer, and an upper confining layer that are sequentially arranged. The waveguide core layer includes a submicron waveguide, a first tapered waveguide, and a waveguide array. The waveguide array includes at least two waveguide groups, the waveguide group includes at least one waveguide chain, the waveguide chain includes at least two waveguides that have different widths, and the waveguides in the waveguide chain are connected to each other. An end of the waveguide chain in the waveguide array is connected to a wide end of the first tapered waveguide, and a narrow end of the first tapered waveguide is connected to the submicron waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.