Patent · US Active

Method for controllably growing ZnO Nanowires

US10319553B2 · kind B2 · utility

0Cited by

4References

21Claims

0Family size

Assignee

Lightlab Sweden AB · SE

Inventors

Jonas TIRÉN · Uppsala, SE
Jan-Otto Carlsson · Uppsala, SE
Helena Tenerz · Uppsala, SE
Patrik Hollman · Uppsala, SE

Key dates

Filing date	Mar 14, 2017
Grant date	Jun 11, 2019
Priority date	—
Expiry date	Mar 14, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2201/30446
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

The present invention relates to a method for controllably growing ZnO nanowires, for example to be used in relation to field emission lighting. In particular, the invention relates to a method of controlling thermal oxidation conditions to achieve steady-state conditions between an oxygen consumption rate by a growing oxide on a surface of a structure and the decomposition rate of the oxygen-carrying species within the chamber. The invention also relates to a corresponding field emission cathode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.