Shock caging features for MEMS actuator structures
US10322925B2 · kind B2 · utility
4Cited by
10References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 26, 2016 |
| Grant date | Jun 18, 2019 |
| Priority date | — |
| Expiry date | Jun 2, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0136
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.