Dry scribing methods, devices and systems
US10322931B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 17, 2017 |
| Grant date | Jun 18, 2019 |
| Priority date | — |
| Expiry date | Dec 8, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2207/012
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A transducer includes a first substrate and an integrated circuit coupled to the first substrate. A sensor is electrically coupled to the integrated circuit and includes a second substrate having a first surface and a second surface opposite the first surface. The second substrate has scribe boundaries defining an outer edge of the second substrate and a chamber extending from the first surface towards but not reaching the second surface. A chamber extends from the second surface to meet the chamber from first surface. Scribe trenches in the second surface at the scribe boundaries have a width from the scribe boundary towards the chamber extending from the second surface. A membrane extends over the first surface and over the chamber extending from first surface. A plate extends from the first surface of the second substrate over the membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.