Radiation source cleaning system and module containing same
US10322947B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 25, 2013 |
| Grant date | Jun 18, 2019 |
| Priority date | — |
| Expiry date | Sep 21, 2034 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC02F2201/324
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
There is described a cleaning system for a radiation source. The cleaning system comprises: (i) a cleaning chamber housing; (ii) a cleaning cartridge removably disposed in the cleaning chamber housing; and (iii) an endcap element removably coupled to the cleaning chamber housing. The cleaning cartridge comprises a first sealing element and a second sealing element, the first sealing element and the second sealing element configured to provide a substantially fluid tight seal with respect to an exterior surface of the radiation source. A radiation source module and a fluid treatment system comprising the radiation source module are also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.