Patent · US Active

Radiation source cleaning system and module containing same

US10322947B2 · kind B2 · utility

0Cited by
5References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 25, 2013
Grant dateJun 18, 2019
Priority date
Expiry dateSep 21, 2034

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC02F2201/324
  • WIPO fieldChemical engineering
  • WIPO sectorChemistry

Abstract

There is described a cleaning system for a radiation source. The cleaning system comprises: (i) a cleaning chamber housing; (ii) a cleaning cartridge removably disposed in the cleaning chamber housing; and (iii) an endcap element removably coupled to the cleaning chamber housing. The cleaning cartridge comprises a first sealing element and a second sealing element, the first sealing element and the second sealing element configured to provide a substantially fluid tight seal with respect to an exterior surface of the radiation source. A radiation source module and a fluid treatment system comprising the radiation source module are also described.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.