Step-scanning sensing beam for imaging interferometer
US10323924B2 · kind B2 · utility
Inventor
Key dates
| Filing date | Jan 14, 2018 |
| Grant date | Jun 18, 2019 |
| Priority date | — |
| Expiry date | Jan 14, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In interferometer imaging signal acquisition using a movable optical beam to sample a target with specular or non specular reflecting surfaces or internal features, beam moving during interferometer signal acquisition can generate unwanted phase error due to shifting speckle field. Examples include coherent LIDAR, Interferometry Doppler sensing and optical coherence tomography. During an interferometer signal acquisition period, an interferometer sensing beam can be substantially stationary, and active step-scanning can be synchronized with interferometer signal acquisition cycles. For interferometers using repetitive chirping lasers, passive dispersive counter-scan mechanisms can be used to assist step-scanning operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.