Opening angle measurement of an oscillating MEMS mirror
US10324283B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 3, 2017 |
| Grant date | Jun 18, 2019 |
| Priority date | — |
| Expiry date | Oct 3, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/105
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A device disclosed herein includes a feedback measuring circuit to measure a signal flowing through a movable MEMS mirror. Processing circuitry determines a time at which the signal indicates that a capacitance of the movable MEMS mirror is substantially at a maximum capacitance. The processing circuitry also determines, over a window of time extending from the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum to a given time, a total change in capacitance of the movable MEMS mirror compared to the maximum capacitance. The processor further determines the capacitance at the given time as a function of the total change in capacitance, and determines an opening angle of the movable MEMS mirror as a function of the capacitance at the given time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.