Semiconductor bullet lot dispatch systems and methods

US10325236B2 · kind B2 · utility

Assignee

• Semiconductor Manufacturing International (Shanghai) Corporation · CN

Inventors

• Anthony Zhao · Shanghai, CN
• Allen Wu · San Diego, US
• Teresa Yu · Kowloon, CN
• Xiaobing Tan · Shanghai, CN

Key dates

• Filing date: Nov 13, 2013
• Grant date: Jun 18, 2019
• Expiry date: Jun 28, 2035

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y04S10/50
• WIPO field: IT methods for management
• WIPO sector: Electrical engineering

Abstract

A semiconductor bullet lot dispatch system is provided. The semiconductor bullet lot dispatch system includes a plurality of lots having bullet lots and non-bullet lots, and a processing site having a plurality of load ports used to run the lots. The semiconductor bullet lot dispatch system also includes a bullet lot arriving time initial module configured to collect work flow information of the lots and calculate bullet lot arriving time intervals; and a port remaining time initial module configured to calculate port next available time intervals. Further, the semiconductor bullet lot dispatch system includes a future constraint check module configured to match the bullet lots with the load ports, and a bullet lot scenario engine module configured to calculate a total available lot count of each of available load ports and dispatch the bullet lots to the load ports.