High performance switch for microwave MEMS
US10325742B2 · kind B2 · utility
3Cited by
37References
37Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 27, 2016 |
| Grant date | Jun 18, 2019 |
| Priority date | — |
| Expiry date | Dec 27, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01P3/003
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
The present disclosure provides for a microelectromechanical switch including a first port (e.g., input port), one or more second ports (e.g., output ports), a cantilever beam, and a mechanical spring connected to the cantilever beam for providing a mechanical force to move the cantilever beam. The cantilever beam extends from a first end, which is in contact with either the first port or one of the second ports, to a second end that is switchably connectable to the other of the first port or said one of the second ports. The first and second ports and cantilever beam may be formed in a coplanar waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.