Temperature controller of semiconductor wafer and temperature control method of semiconductor wafer
US10325788B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 17, 2017 |
| Grant date | Jun 18, 2019 |
| Priority date | — |
| Expiry date | Mar 17, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67248
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A manipulated variable calculator having a plurality of control loops and configured to calculate manipulated variables to be respectively given to a plurality of temperature adjusters includes: a reference model output generator configured to generate a reference model that generates a response output until reaching a temperature setpoint when, in the plurality of control loops, a manipulated variable of a control loop having the slowest response speed is defined as 100%; a simulator configured to sequentially search for a switching time to determine a manipulated variable pattern; a reference model configured to generate a reference model output based on the searched switching time; and a reference model selecting unit configured to select the reference model depending on a heating responsiveness and a cooling responsiveness of the temperature adjusters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.