Acoustic resonator with reduced mechanical clamping of an active region for enhanced shear mode response
US10326425B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 21, 2016 |
| Grant date | Jun 18, 2019 |
| Priority date | — |
| Expiry date | Jun 24, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/155
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure provides an acoustic resonator with reduced mechanical clamping of an active region for enhanced shear mode response. More specifically, the present disclosure provides a solidly mounted BAW resonator device with an active region of piezoelectric material laterally surrounded by an inactive region with a reduced thickness of piezoelectric material such that at least an upper portion of the inactive region along a boundary of the active region is devoid of piezoelectric material. The resonator device provides a discontinuity along opposing lateral edges of the piezoelectric material of the active region to reduce mechanical clamping of the active region in a direction of maximum lateral displacement in shear mode operation. Increasing the mechanical isolation of the active region of piezoelectric material decreases mechanical damping of lateral vibrations of the active region which enhances the shear mode response for quasi-shear mode sensing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.