Capacitive pressure difference sensor and method for its manufacture

US10330548B2 · kind B2 · utility

Assignee

• Endress+Hauser SE+Co. KG · DE

Inventors

• Rafael Teipen · Berlin, DE
• Benjamin Lemke · Berlin, DE

Key dates

• Filing date: Jun 8, 2015
• Grant date: Jun 25, 2019
• Expiry date: Aug 10, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L13/025
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure difference sensor includes first and second counterelectrodes, a conductive disk between the counterelectrodes, a first insulating layer connecting an outer edge of the disk with an outer edge of the first counterelectrode forming a first pressure chamber, a second insulating layer connecting an outer edge of the disk with an outer edge of the second counterelectrode forming a second pressure chamber, an opening in the first counterelectrode, via which the first pressure chamber is contactable with a first pressure, and an opening in the second counterelectrode, via which the second pressure chamber is contactable with a second pressure. The disk is divided into inner and outer regions, the inner region includes a measuring membrane arranged between the two pressure chambers and an edge region, the inner region forms with each of the counterelectrodes a capacitor having a capacitance dependent on a pressure difference acting on the measuring membrane.