Automatic X-ray inspection apparatus for SMT inline process
US10330611B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2012 |
| Grant date | Jun 25, 2019 |
| Priority date | — |
| Expiry date | Sep 20, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/419
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to an automatic X-ray inspection apparatus for a SMT inline process, comprising: a stage unit for supporting an object to be inspected such that the object is attachable/detachable, the stage unit being movable on an X-axis and Y-axis in a plane and rotatable; an X-ray vacuum tube arranged beneath the stage unit so as to irradiate the object arranged on the stage unit with X-rays; and a detector arranged above the stage unit so as to swivel toward one side in order to detect X-rays transmitted through the object. The X-ray vacuum tube swivels in synchronization with the swiveling of the detector, and an X-ray emission surface of the X-ray vacuum tube is arranged so as to be parallel to the stage unit. The stage unit has a hollow shaft, and a hollow bearing that supports the hollow shaft such that the hollow shaft is rotatable.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.