Active, in-situ, calibration of MEMS accelerometers using optical forces
US10330697B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 8, 2015 |
| Grant date | Jun 25, 2019 |
| Priority date | — |
| Expiry date | Feb 23, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P21/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An accelerometer device configured for in-situ calibration applies a laser-induced pushing force at a first magnitude to a proof mass of an accelerometer, and while applying the laser-induced pushing force at the first magnitude to the proof mass, the device obtains a first output from the accelerometer. The device is further configured to apply a laser-induced pushing force at a second magnitude to the proof mass, and while applying the laser-induced pushing force at the second magnitude to the proof mass, the device obtains a second output from the accelerometer. Based on the first output and the second output, the device determines a scale factor for the accelerometer. The device is configured to determine a third output for the accelerometer, and based on the scale factor and the third output, determine an acceleration value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.