Hybrid MEMS scanning module
US10330921B2 · kind B2 · utility
2Cited by
5References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 14, 2017 |
| Grant date | Jun 25, 2019 |
| Priority date | — |
| Expiry date | Sep 16, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/105
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A scanning device includes a base containing one or more rotational bearings disposed along a gimbal axis. A gimbal includes a shaft that fits into the rotational bearings so that the gimbal rotates about the gimbal axis relative to the base. A mirror assembly includes a semiconductor substrate, which has been etched and coated to define a support, which is fixed to the gimbal, at least one mirror, contained within the support, and a connecting member connecting the at least one mirror to the support and defining at least one mirror axis, about which the at least one mirror rotates relative to the support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.