Dynamic-magnetic steel magnet levitation double-workpiece-stage vector arc switching method and apparatus based on wireless energy transmission
US10331044B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 31, 2016 |
| Grant date | Jun 25, 2019 |
| Priority date | — |
| Expiry date | Aug 31, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A dynamic-magnetic steel magnetic levitation double-workpiece-stage vector arc switching method and apparatus based on wireless energy transmission, falling within the semiconductor manufacturing equipment technology. The apparatus comprises a support frame (1), a balance mass block (2), magnetic levitation workpiece stages (4a, 4b), a workpiece stage measurement apparatus, wireless energy transmission apparatuses (5a, 5b) and a wireless energy receiving apparatus (406), wherein the two workpiece stages work between a measurement site (11) and an exposure site (12); a laser interferometer (6) is used to measure the positions of the workpiece stages; the wireless energy transmission apparatuses (5a, 5b) are used to provide energy for a sensor (407) in a micro-drive stage; the workpiece stages are driven using a magnetic levitation planar electrical motor; and during a double-workpiece-stage switching process, the planar electrical motor is used to drive the two workpiece stages so as to achieve single-beat arc quick switching. By using the method and apparatus, the problem that an existing stage switching scheme has many beats, a long track, many start-stop links and a long time for…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.