Patent · US Active

Semiconductor device including a bit line

US10332831B2 · kind B2 · utility

4Cited by
6References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 30, 2017
Grant dateJun 25, 2019
Priority date
Expiry dateSep 1, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10B12/315
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device includes a substrate including a cell array region including a cell active region. An insulating pattern is on the substrate. The insulating pattern includes a direct contact hole which exposes the cell active region and extends into the cell active region. A direct contact conductive pattern is in the direct contact hole and is connected to the cell active region. A bit line is on the insulating pattern. The bit line is connected to the direct contact conductive pattern and extends in a direction orthogonal to an upper surface of the insulating pattern. The insulating pattern includes a first insulating pattern including a non-metal-based dielectric material and a second insulating pattern on the first insulating pattern. The second insulating pattern includes a metal-based dielectric material having a higher dielectric constant than a dielectric constant of the first insulating pattern.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.