Patent · US Active

Thin film transistor, manufacturing method for array substrate, array substrate and display device

US10332987B2 · kind B2 · utility

2Cited by
2References
11Claims
0Family size

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Key dates

Filing dateJan 20, 2017
Grant dateJun 25, 2019
Priority date
Expiry dateJan 20, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D86/0231
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A thin film transistor, a manufacturing method for an array substrate, the array substrate, and a display device are provided. The manufacturing method for a thin film transistor includes: forming a semiconductor layer; performing a modification treatment on a surface layer of a region of the semiconductor layer, so that the region of the semiconductor layer has a portion in a first direction perpendicular to the semiconductor layer formed as an etching blocking layer, portions of the semiconductor layer on both sides of the etching blocking layer in a second direction parallel to a surface of the semiconductor layer remaining unmodified; and forming a source electrode and a drain electrode on the semiconductor layer, the source electrode and the drain electrode being formed on both sides of a center line of the region perpendicular to the second direction, and spaced from each other in the second direction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.