Micro electro mechanical systems sensor
US10336605B2 · kind B2 · utility
1Cited by
2References
44Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 21, 2014 |
| Grant date | Jul 2, 2019 |
| Priority date | — |
| Expiry date | Jun 24, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0842
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a MEMS sensor including: a mass body; a support part floatably supporting the mass body; and a flexible beam having one end connected to the mass body and the other end connected to the support part. At least one end of the flexible beam connected to the mass body or the support part includes a curved portion to maximize an effective length supporting a load.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.