High speed vacuum cycling excitation system for optical inspection systems
US10337969B2 · kind B2 · utility
1Cited by
6References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 21, 2017 |
| Grant date | Jul 2, 2019 |
| Priority date | — |
| Expiry date | Nov 4, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2203/0417
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A vacuum system and method for inspecting a workpiece that can include use of the vacuum system, where the vacuum system can include a housing defining at least a portion of a vacuum chamber, a piston within the housing that oscillates to vary a volume of the vacuum chamber, a first valve and a second valve in fluid communication with the vacuum chamber, and a hood in fluid communication with the second valve and the vacuum chamber. The vacuum system can include high-speed valves that enable vacuum system cycling and thus vacuum pressure cycling at a rapid frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.