Substrates handling in a deposition system
US10340166B2 · kind B2 · utility
1Cited by
13References
2Claims
0Family size
Inventor
Key dates
| Filing date | Nov 22, 2015 |
| Grant date | Jul 2, 2019 |
| Priority date | — |
| Expiry date | Jun 3, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K13/0061
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention describe a substrate handling system that exerts no or controllable external forces to hold substrates, does not contact front or back of the substrates, has minimum contact with side edge area of the substrate, can hold one or two substrate to each position, can be positioned in any orientation, and can be easily handled by human or robots. In the case that no deposition materials is desirable on the edge or sides of substrate, a self-aligned mask that can be attached to the substrate carrier is presented.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.