Method of determining a concentration of a material not dissolved by silicon etchants contaminating a product

US10345211B2 · kind B2 · utility

Assignee

• HEMLOCK SEMICONDUCTOR OPERATIONS LLC · US

Inventors

• John W. Hadd · Saginaw, US
• Robert Scott Leser · Burghausen, DE
• Jonathon Host · Evanston, US

Key dates

• Filing date: Mar 28, 2016
• Grant date: Jul 9, 2019
• Expiry date: May 31, 2037

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C01B33/037
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method of determining a concentration of plastic or other material not dissolved by silicon etchants contaminating a silicon product comprising: obtaining a sample of the silicon product contaminated with the plastic or other material not dissolved by silicon etchants; placing the sample of the silicon product into a ultrasonic bath liquid to produce a slurry comprising the ultrasonic bath liquid, silicon dust, and the plastic or other material not dissolved by silicon etchants; filtering the slurry with a first filter to produce a cake comprising the silicon dust and the plastic or other material not dissolved by silicon etchants separated from the sample of the silicon product; and analyzing the cake to determine the concentration of plastic or other material not dissolved by silicon etchants contaminating the silicon product.