Patent · US Active

Cantilevers with one- or two-dimensional actuation for on-chip active waveguide coupling alignment

US10345525B2 · kind B2 · utility

0Cited by

5References

19Claims

0Family size

Assignee

ACACIA COMMUNICATIONS, INC. · US

Inventors

Christopher Doerr · Fryeburg, US
Li Chen · Maynard, US
Long Chen · Marlboro, US

Key dates

Filing date	Jun 30, 2017
Grant date	Jul 9, 2019
Priority date	—
Expiry date	Jun 30, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG02B6/428
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Photonic integrated circuits including controllable cantilevers are described. Such photonic integrated circuits may be used in connection with other optical devices, in which light is transferred between the photonic integrated circuit and one of these optical device. The photonic integrated circuit may comprise an optical waveguide having an end disposed proximate to a facet of the cantilever. The orientation of the cantilever may be actively controlled in one or two dimensions, thus adjusting the orientation of the optical waveguide. Actuation of the cantilever may be performed, for example, thermally and/or electrostatically. Orientation of the cantilever may be performed in such a way to align the optical waveguide with an optical device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.