Anodically bonded cells with optical elements
US10345548B2 · kind B2 · utility
0Cited by
3References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 26, 2014 |
| Grant date | Jul 9, 2019 |
| Priority date | — |
| Expiry date | Sep 10, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B1/11
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The disclosure provides an optical apparatus including at least one optical element including glass, at least one support including silicon and a housing including glass. Furthermore, the at least one optical element and the at least one support can be anodically bonded together, and the at least one support and the housing can be anodically bonded together. The disclosure further provides a method for fabricating optical components with durable bonds and incorporates active alignment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.