Photolithographic patterning of a cylinder
US10345705B2 · kind B2 · utility
0Cited by
7References
22Claims
0Family size
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Key dates
| Filing date | Jul 12, 2013 |
| Grant date | Jul 9, 2019 |
| Priority date | — |
| Expiry date | Jul 23, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03G15/0921
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Methods herein form a photoresist on an exterior of a cylinder and expose the photoresist to a light source while rotating the cylinder. Such methods develop the photoresist, after exposing, to change the photoresist into a patterned protective layer on the exterior of the cylinder. Then, these methods pattern the exterior of the cylinder while rotating the cylinder using the patterned protective layer to produce a patterned cylinder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.