Patent · US Active

Photolithographic patterning of a cylinder

US10345705B2 · kind B2 · utility

0Cited by
7References
22Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 12, 2013
Grant dateJul 9, 2019
Priority date
Expiry dateJul 23, 2036

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03G15/0921
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Methods herein form a photoresist on an exterior of a cylinder and expose the photoresist to a light source while rotating the cylinder. Such methods develop the photoresist, after exposing, to change the photoresist into a patterned protective layer on the exterior of the cylinder. Then, these methods pattern the exterior of the cylinder while rotating the cylinder using the patterned protective layer to produce a patterned cylinder.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.