Patent · US Active

Micromechanical piezoelectric actuators for implementing large forces and deflections

US10349182B2 · kind B2 · utility

3Cited by

5References

15Claims

0Family size

Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Fabian STOPPEL · Itzehoe, DE
Bernhard Wagner · Fellbach, DE

Key dates

Filing date	Mar 3, 2017
Grant date	Jul 9, 2019
Priority date	—
Expiry date	Mar 3, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH10N30/2043
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A MEMS includes a diaphragm, a stroke structure coupled to the diaphragm, and at least two piezoelectric actuators coupled to a plurality of mutually spaced-apart contact points of the stroke structure via a plurality of mutually spaced-apart connecting elements, the at least two piezoelectric actuators being configured to cause a stroke movement of the stroke structure so as to deflect the diaphragm.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.