Patent · US Active

MEMS microphone system and method

US10349188B2 · kind B2 · utility

4Cited by

0References

18Claims

0Family size

Assignees

Akustica, Inc. · US
Robert Bosch GmbH · DE

Inventors

Daniel Christoph Meisel · Pittsburgh, US
Bernhard Gehl · Wannweil, DE
Yujie Zhang · Lomita, US
Andrew J. Doller · Shaler Township, US
Gokhan Hatipoglu · Pittsburgh, US

Key dates

Filing date	Oct 18, 2017
Grant date	Jul 9, 2019
Priority date	—
Expiry date	Oct 18, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2201/003
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A Microelectromechanical system (MEMS) microphone comprises a base unit and a driving system disposed on the base unit. The driving system comprises a first diaphragm, a second diaphragm spaced apart from the first diaphragm, and a comb finger counter electrode assembly comprising a moving electrode member, the counter electrode assembly is mechanically coupled to the first and second diaphragms. The driving system further comprises a side wall mechanically coupled the first diaphragm to the second diaphragm defining a sealed electrode region and the sealed electrode region having an encapsulated gas pressure and the comb finger counter electrode assembly is disposed within the sealed electrode region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.