Laser irradiation method and apparatus
US10350710B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 8, 2015 |
| Grant date | Jul 16, 2019 |
| Priority date | — |
| Expiry date | Apr 8, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/80
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser irradiation method sets scan lines in an x direction in parallel, and in a y direction to be separate by an inter-scan-line distance Py corresponding to laser irradiation areas of a processing target object, orients a length direction of a linear laser spot with length Wy and width Wx in the y direction, and irradiates target object with the laser spot in each of irradiation positions arranged at width direction intervals Λ while moving the laser spot relative to the target object along the scan lines. The method includes determining the inter-scan-line distance Py, the width direction interval Λ, and a position shift quantity Δx (where, 0<Δx<Λ) so that the irradiation positions on adjacent scan lines are shifted in the x direction by the position shift quantity Δx and a cumulative value of the applied laser intensity is substantially equalized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.