Gyro sensor and electronic apparatus
US10352700B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 31, 2015 |
| Grant date | Jul 16, 2019 |
| Priority date | — |
| Expiry date | Nov 21, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/802
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gyro sensor having increased sensitivity is provided, along with an electronic apparatus including the gyro sensor. The gyro sensor includes: a vibrator; a first piezoelectric layer, and a second piezoelectric layer. The first piezoelectric layer, which includes a first electrode pair and a first piezoelectric film arranged between the first electrode pair, is arranged on a front surface of the vibrator and is capable of causing the vibrator to vibrate in a first axis direction vertical to the front surface. The second piezoelectric layer, which includes a second electrode pair and a second piezoelectric film arranged between the second electrode pair, is arranged on the first piezoelectric layer and is capable of causing the vibrator to vibrate in the first axis direction. The second piezoelectric layer functions synchronously with the first piezoelectric layer to cause the vibrator to vibrate in the first axis direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.